发明申请
- 专利标题: Method for improving the imaging properties of a projection objective for a microlithographic projection exposure apparatus
- 专利标题(中): 用于改善微光刻投影曝光装置的投影物镜的成像特性的方法
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申请号: US11220643申请日: 2005-09-08
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公开(公告)号: US20060077371A1公开(公告)日: 2006-04-13
- 发明人: Ulrich Wegmann , Vladimir Kamenov , Thomas Muelders , Toralf Gruner
- 申请人: Ulrich Wegmann , Vladimir Kamenov , Thomas Muelders , Toralf Gruner
- 专利权人: CARL ZEISS SMT AG
- 当前专利权人: CARL ZEISS SMT AG
- 优先权: DE102004043280.5 20040908
- 主分类号: G03B27/54
- IPC分类号: G03B27/54
摘要:
In a method for improving the imaging properties of a projection objective of a microlithographic projection exposure apparatus, an appropriate illumination angle distribution adapted to a mask (24; 224) to be projected is selected. Then locations (40a, 40b; 60a, 60b; 80a, 80b, 80c) in an exit pupil of the projection objective (20), which are illuminated under these conditions by projection light during a projection of the mask, are determined. For at least one image point, an actual value of an imaging quantity, e.g. a wavefront profile or a polarization state, is determined that influences the imaging properties of the projection objective. Finally, corrective measures are calculated such that the actual value of the imaging quantity approximates a desired value at these locations. In this last step, however, deviations of the actual value from the desired value are taken into account exclusively at said locations illuminated in the exit pupil.
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