- 专利标题： Enclosed container lid opening/closing system and enclosed container lid opening/closing method
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申请号： US11257307申请日： 2005-10-25
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公开(公告)号： US20060088406A1公开(公告)日： 2006-04-27
- 发明人: Toshihiko Miyajima , Hitoshi Suzuki , Hiroshi Igarashi
- 申请人： Toshihiko Miyajima , Hitoshi Suzuki , Hiroshi Igarashi
- 申请人地址： JP Tokyo
- 专利权人： TDK CORPORATION
- 当前专利权人： TDK CORPORATION
- 当前专利权人地址： JP Tokyo
- 优先权： JP2004-310327 20041026
- 主分类号： B65H1/00
- IPC分类号： B65H1/00 ; B65B69/00 ; B65G1/00 ; H01L21/677
摘要：
In order to easily and surely remove contaminants or the like from wafers stored in a pod (FOUP), a gas supply pipe is located above an opening portion in a FIMS system. A clean gas is blown to the upper surfaces of the wafers stored in the inner portion of the pod through the gas supply pipe to remove the contaminants or the like from wafers.