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1.发明授权Enclosed container lid opening/closing system and enclosed container lid opening/closing method 有权封闭集装箱盖打开/关闭系统和封闭容器盖打开/关闭方法公开(公告)号：US07523769B2
公开(公告)日：2009-04-28
申请号：US11257307
申请日：2005-10-25
IPC分类号： B65B31/04 , B65D85/86 , B65G1/133 , H01L21/673
CPC分类号： H01L21/67017 , H01L21/67772
摘要： In order to easily and surely remove contaminants or the like from wafers stored in a pod (FOUP), a gas supply pipe is located above an opening portion in a FIMS system. A clean gas is blown to the upper surfaces of the wafers stored in the inner portion of the pod through the gas supply pipe to remove the contaminants or the like from wafers.
摘要翻译： 为了容易且可靠地从存储在容器（FOUP）中的晶片中除去污染物等，气体供给管位于FIMS系统中的开口部分的上方。 通过气体供给管将清洁气体吹送到容纳在容器内部的晶片的上表面，以从晶片去除污染物等。
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2.发明申请公开(公告)号：US20060088406A1
公开(公告)日：2006-04-27
申请号：US11257307
申请日：2005-10-25
IPC分类号： B65H1/00 , B65B69/00 , B65G1/00 , H01L21/677
CPC分类号： H01L21/67017 , H01L21/67772
摘要： In order to easily and surely remove contaminants or the like from wafers stored in a pod (FOUP), a gas supply pipe is located above an opening portion in a FIMS system. A clean gas is blown to the upper surfaces of the wafers stored in the inner portion of the pod through the gas supply pipe to remove the contaminants or the like from wafers.
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公开(公告)号：US07654291B2
公开(公告)日：2010-02-02
申请号：US10554504
申请日：2004-04-28
IPC分类号： H01L21/673 , H01L21/677
CPC分类号： H01L21/67772 , H01L21/67017 , H01L21/67389 , Y10S414/135
摘要： It is an object of the present invention to easily and securely perform the removal operation of contaminant or the like from a wafer housed in a FOUP. To achieve the object, a purging apparatus of the present invention removes contaminant or the like from a wafer by moving a gas supply nozzle along a direction in which wafers are superimposed at the front of an opening while a lid of the FOUP is separated from a body and spraying clean gas on each wafer from the gas supply nozzle.
摘要翻译： 本发明的目的是从容纳在FOUP中的晶片容易且可靠地执行污染物等的去除操作。 为了实现该目的，本发明的清洗装置通过沿着开口的前部的晶片叠合方向移动气体供给喷嘴，同时将FOUP的盖子与 并从气体供应喷嘴在每个晶片上喷射清洁气体。
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公开(公告)号：US20100117377A1
公开(公告)日：2010-05-13
申请号：US12615359
申请日：2009-11-10
CPC分类号： E05B17/0029 , E05C9/02 , Y10T292/0808 , Y10T292/0824 , Y10T292/0845 , Y10T292/0964 , Y10T292/1021 , Y10T292/1038
摘要： In a pod used in an FIMS system, an engaged portion is provided on the outer surface of the lid of a pod. A through hole is provided in a flange portion that is provided around the pod opening and in which the lid is to be received. The through-hole allows access to the engaged portion from the external space. A latch mechanism is supported on the pod body side surface of the flange portion in such a way that it can slide in a direction parallel to the side wall of the flange. The engagement portion of the latch mechanism reaches the engaged portion through the aforementioned through-hole. Movement of the latch mechanism brings the engagement portion into an engaging state and a disengaged state.
摘要翻译： 在用于FIMS系统的荚中，在荚的盖的外表面上设置一个啮合部分。 在设置在容器开口周围的凸缘部分设有通孔，盖子将被容纳在该通孔中。 通孔允许从外部空间接合被接合部分。 闩锁机构以能够沿与凸缘的侧壁平行的方向滑动的方式支撑在凸缘部的荚体主体侧表面上。 闩锁机构的接合部分通过上述通孔到达接合部分。 闩锁机构的移动使接合部分进入接合状态和脱离状态。
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公开(公告)号：US06984839B2
公开(公告)日：2006-01-10
申请号：US10301841
申请日：2002-11-22
CPC分类号： H01L21/67265 , G01V8/12 , H01L21/67772 , Y10S414/137
摘要： A wafer processing apparatus on which a pod having an opening is detachably mounted is provided with a door unit and a mapping unit provided with a transmitting type sensor having an emitter and a detector forming a slot therebetween. The emitter and the detector are moved toward the opening in the pod and are plunged into the interior of the pod after a door is opened by the door unit, and the slot between the emitter and the detector crosses an end portion of a wafer to thereby detect the presence or absence of the wafer. Thereby, a mechanism portion liable to produce dust which may adhere to the wafer and cause the contamination thereof can be disposed separately from the pod.
摘要翻译： 具有可拆卸地安装有开口的容器的晶片处理装置设置有门单元和映射单元，该单元设置有具有发射器的传输型传感器和在其间形成狭槽的检测器。 发射器和检测器朝向容器中的开口移动，并且在门被门单元打开之后被插入到容器的内部，并且发射器和检测器之间的槽与晶片的端部相交，由此 检测晶片的存在或不存在。 因此，可以与容器分开设置容易产生可能附着在晶片上并导致其污染的灰尘的机构部分。
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公开(公告)号：US08562273B2
公开(公告)日：2013-10-22
申请号：US13212576
申请日：2011-08-18
IPC分类号： H01L21/677
CPC分类号： H01L21/67772 , H01L21/67775
摘要： Provided is a load port apparatus having a structure capable of resisting against a moment generated at a time of driving of a door increased in weight owing to upsizing. A pair of rectangular main bases, which project perpendicularly to an attachment surface of the load port apparatus and elongated parallel to the attachment surface, are coupled to each other with a coupling shaft, and the structural body including those components is fixed to the attachment surface through intermediation of I-shaped plates capable of being held in close surface contact with the attachment surface. Mechanisms of a door drive mechanism, a placing table, and the like are arranged on an inner side between the pair of main bases of the structural body.
摘要翻译： 提供一种装载端口装置，其具有能够抵抗由于大型化而增加重量的门驱动时产生的时刻的结构。 一对矩形主基座垂直于负载端口装置的连接表面突出并且平行于附接表面延伸，并用连接轴彼此联接，包括这些部件的结构体固定在附接表面上 通过能够保持与附接表面紧密表面接触的I形板的中介。 门驱动机构，放置台等的机构设置在结构体的一对主基座之间的内侧。
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公开(公告)号：US08528947B2
公开(公告)日：2013-09-10
申请号：US12491574
申请日：2009-06-25
CPC分类号： H01L21/67772 , Y10T292/0808 , Y10T292/0824 , Y10T292/0845 , Y10T292/1021 , Y10T292/1038
摘要： In a pod used in an FIMS system, diffusion of dust particles or the like adhering on the lid of the pod to the interior of the system is reduced. An engaged portion is provided inside the outer surface of the lid of the pod, and a flange portion provided around a pod opening to which the lid can be fitted is provided with an insertion hole that allows access to the engaged portion from the exterior space. A latch mechanism is supported on the pod body side surface of the flange portion in such a way that the latch mechanism can slide along a direction parallel to the side wall of the flange. An engagement portion of the latch mechanism reaches the engaged portion through the insertion hole, and the state of the latch mechanism changes between an engaged state and a disengaged state with movement of the latch mechanism.
摘要翻译： 在用于FIMS系统的荚中，减少了附着在荚的盖上的灰尘颗粒等的扩散到系统的内部。 一个啮合部分设置在荚的盖子的外表面内部，并且设置在可以装配盖子的荚壳开口周围的凸缘部分设置有允许从外部空间进入被接合部分的插入孔。 闩锁机构被支撑在凸缘部分的荚体主体侧表面上，使得闩锁机构可以沿着平行于凸缘的侧壁的方向滑动。 闩锁机构的接合部分通过插入孔到达接合部分，并且闩锁机构的状态随着闩锁机构的移动而在接合状态和脱离状态之间变化。
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公开(公告)号：US08876173B2
公开(公告)日：2014-11-04
申请号：US13041786
申请日：2011-03-07
CPC分类号： E05F11/02 , Y10S292/11 , Y10S292/25 , Y10T292/0803 , Y10T292/0805 , Y10T292/0808 , Y10T292/0811 , Y10T292/0824 , Y10T292/0845 , Y10T292/0859 , Y10T292/0886 , Y10T292/1021 , Y10T292/1038
摘要： The substrate storage pod includes an engagement portion in an outer side surface of a lid of the pod, and an insertion slot through which the engagement portion can be accessed from an external space; the insertion slot is formed in a flange portion arranged around the periphery of an opening in the pod and into which the lid can be fitted, and a latch mechanism supported so as to be slidable in a direction parallel to a flange side wall in a pod main body-surface of the flange portion. An engaging portion of the latch mechanism reaches the engagement portion via the insertion slot. The engagement portion is switched between an engaged state and a non-engaged state in response to movement of the latch mechanism.
摘要翻译： 所述基板收容容器在所述容器的盖的外侧面上具有接合部，所述插入槽能够从外部空间接合所述卡合部; 插入槽形成在布置在容器中的开口的周边周围的凸缘部分中，并且盖可以被装配到该凸缘部分中;以及闩锁机构，该闩锁机构被支撑以能够在平行于壳体中的凸缘侧壁的方向上滑动 凸缘部分的主体表面。 闩锁机构的接合部分经由插入槽到达接合部分。 响应于闩锁机构的移动，接合部分在接合状态和非接合状态之间切换。
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公开(公告)号：US08657346B2
公开(公告)日：2014-02-25
申请号：US12624579
申请日：2009-11-24
CPC分类号： H01L21/67772 , Y10T292/0808 , Y10T292/0824 , Y10T292/0845 , Y10T292/1021 , Y10T292/1038
摘要： The FIMS system is for use with a pod composed of a lid having an engaged portion provided on the outer surface thereof and a pod body having a latch mechanism including an engagement portion that engages the engaged portion as it moves along a predetermined axis to fix the lid to the pod. The FIMS system has a latch mechanism drive means for driving the latch mechanism along a certain axis and an engagement portion position sensor that can generate a signal indicating whether the engagement portion is at an engagement position or non-engagement position when the latch mechanism drive means drives the latch mechanism. The latch mechanism drive means and the engagement portion position sensor are provided in the vicinity of a first opening portion of the FIMS system.
摘要翻译： FIMS系统用于由盖子组成的盒盖，盖子具有设置在其外表面上的接合部分，以及盒体，其具有闩锁机构，该闩锁机构包括接合部分，该接合部分沿着预定轴线移动时与接合部分接合以固定 盖到荚。 FIMS系统具有用于沿着某个轴线驱动闩锁机构的闩锁机构驱动装置和接合部位置传感器，当闩锁机构驱动装置可以产生指示接合部分是否处于接合位置或非接合位置的信号 驱动闩锁机构。 闩锁机构驱动装置和接合部位置传感器设置在FIMS系统的第一开口部分附近。
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公开(公告)号：US20110215028A1
公开(公告)日：2011-09-08
申请号：US13041786
申请日：2011-03-07
CPC分类号： E05F11/02 , Y10S292/11 , Y10S292/25 , Y10T292/0803 , Y10T292/0805 , Y10T292/0808 , Y10T292/0811 , Y10T292/0824 , Y10T292/0845 , Y10T292/0859 , Y10T292/0886 , Y10T292/1021 , Y10T292/1038
摘要： The substrate storage pod includes an engagement portion in an outer side surface of a lid of the pod, and an insertion slot through which the engagement portion can be accessed from an external space; the insertion slot is formed in a flange portion arranged around the periphery of an opening in the pod and into which the lid can be fitted, and a latch mechanism supported so as to be slidable in a direction parallel to a flange side wall in a pod main body-surface of the flange portion. An engaging portion of the latch mechanism reaches the engagement portion via the insertion slot. The engagement portion is switched between an engaged state and a non-engaged state in response to movement of the latch mechanism.
摘要翻译： 所述基板收容容器在所述容器的盖的外侧面上具有接合部，所述插入槽能够从外部空间接合所述卡合部; 插入槽形成在布置在容器中的开口的周边周围的凸缘部分中，并且盖可以被装配到该凸缘部分中;以及闩锁机构，该闩锁机构被支撑以能够在平行于壳体中的凸缘侧壁的方向上滑动 凸缘部分的主体表面。 闩锁机构的接合部分经由插入槽到达接合部分。 响应于闩锁机构的移动，接合部分在接合状态和非接合状态之间切换。
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