Invention Application
- Patent Title: Polyurethane urea polishing pad
- Patent Title (中): 聚氨酯尿素抛光垫
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Application No.: US10974529Application Date: 2004-10-27
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Publication No.: US20060089093A1Publication Date: 2006-04-27
- Inventor: Robert Swisher , Alan Wang , William Allison
- Applicant: Robert Swisher , Alan Wang , William Allison
- Main IPC: B29C44/00
- IPC: B29C44/00 ; B24D11/00

Abstract:
The present invention relates to an article for altering a surface of a workpiece, or a polishing pad. In particular, the polishing pad includes a polyurethane urea material wherein at least a portion of the polyurethane urea material contains cells which are at least partially filled with gas. The polyurethane urea material can be prepared by combining polyisocyanate and/or polyurethane prepolymer, hydroxyl-containing material, amine-containing material and blowing agent. The polishing pad according to the present invention is useful for polishing articles, and is especially useful for chemical mechanical polishing or planarization of microelectronic and optical electronic devices such as but not limited to semiconductor wafers.
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