Processes and systems for formation of high voltage, anodic oxide on a valve metal anode. The processes generally includes immersing a valve metal anode in an electrolyte forming bath comprised of a formation electrolyte, performing an anodization step; and maintaining or regulating the temperature of the formation electrolyte accurately at a temperature at or below 40° C. during the anodization step. The anodization firstly under constant current until a target potential is reached and secondly under constant potential at the target potential until the current falls below a predetermined termination current level. The systems generally include a tank configured to receive one or more anodes in an electrolyte forming bath comprised of a formation electrolyte; and a subsystem for cooling and maintaining the formation electrolyte at the desire processing temperature. The systems may further include electronic controls for monitoring and adjusting system or process parameters.