发明申请
- 专利标题: Self-aligned gated p-i-n diode for ultra-fast switching
- 专利标题(中): 用于超快速开关的自对门控p-i-n二极管
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申请号: US11077478申请日: 2005-03-10
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公开(公告)号: US20060091490A1公开(公告)日: 2006-05-04
- 发明人: Hung-Wei Chen , Wen-Chin Lee , Chih-Hsin Ko , Min-Hwa Chi , Chung-Hu Ke
- 申请人: Hung-Wei Chen , Wen-Chin Lee , Chih-Hsin Ko , Min-Hwa Chi , Chung-Hu Ke
- 主分类号: H01L31/105
- IPC分类号: H01L31/105
摘要:
A gated p-i-n diode and a method for forming the same. The gated p-i-n diode comprises: a semiconductor substrate; a gate dielectric over the semiconductor substrate; a gate electrode on the gate dielectric; a source gate spacer and a drain gate spacer along respective edges of the gate dielectric and the gate electrode; a source doped with a first type of dopant substantially under the source gate spacer wherein the source has a horizontal distance from a first edge of the gate electrode; a drain doped with the opposite type of the source substantially under the drain spacer and substantially aligned horizontally with a second edge of the gate electrode; a source silicide adjacent the source; and a drain silicide adjacent the drain.
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