发明申请
US20060096612A1 System and method for aligning wafers within wafer processing equipment 失效
在晶片加工设备中对准晶片的系统和方法

System and method for aligning wafers within wafer processing equipment
摘要:
Systems and methods for aligning wafers within wafer processing equipment. In a first embodiment, a wafer alignment nozzle comprises a fixed cylindrical member. A moveable cylindrical member is disposed with the fixed cylindrical member in a sliding fit. The moveable cylindrical member comprises a plurality of angled fluid orifices for directing a plurality of streams of the fluid onto a surface of the wafer.
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