发明申请
US20060096612A1 System and method for aligning wafers within wafer processing equipment
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在晶片加工设备中对准晶片的系统和方法
- 专利标题: System and method for aligning wafers within wafer processing equipment
- 专利标题(中): 在晶片加工设备中对准晶片的系统和方法
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申请号: US10982029申请日: 2004-11-05
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公开(公告)号: US20060096612A1公开(公告)日: 2006-05-11
- 发明人: Jian-Huei Feng , Hung-Chin Guthrie , Quang Le , James Nystrom
- 申请人: Jian-Huei Feng , Hung-Chin Guthrie , Quang Le , James Nystrom
- 主分类号: C23G1/00
- IPC分类号: C23G1/00 ; B08B3/00
摘要:
Systems and methods for aligning wafers within wafer processing equipment. In a first embodiment, a wafer alignment nozzle comprises a fixed cylindrical member. A moveable cylindrical member is disposed with the fixed cylindrical member in a sliding fit. The moveable cylindrical member comprises a plurality of angled fluid orifices for directing a plurality of streams of the fluid onto a surface of the wafer.
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