发明申请
- 专利标题： Dielectric materials for electronic devices
- 专利标题（中）： 用于电子设备的电介质材料
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申请号： US10982472申请日： 2004-11-05
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公开(公告)号： US20060097360A1公开(公告)日： 2006-05-11
- 发明人: Yiliang Wu , Beng Ong , Ping Liu
- 申请人： Yiliang Wu , Beng Ong , Ping Liu
- 专利权人： Xerox Corporation
- 当前专利权人： Xerox Corporation
- 主分类号： H01L23/58
- IPC分类号： H01L23/58
摘要：
A dielectric material prepared from a siloxy/metal oxide hybrid composition, and electronic devices such as thin film transistors comprising such dielectric material are provided herein. The siloxy/metal oxide hybrid composition comprises a siloxy component such as, for example, a siloxane or silsesquioxane. The siloxy/metal oxide hybrid composition is useful for the preparation of dielectric layers for thin film transistors using solution deposition techniques
公开/授权文献
- US07170093B2 Dielectric materials for electronic devices 公开/授权日：2007-01-30
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