发明申请
- 专利标题: Liquid discharge recording head and method for manufacturing same
- 专利标题(中): 液体放电记录头及其制造方法
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申请号: US11261511申请日: 2005-10-31
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公开(公告)号: US20060098055A1公开(公告)日: 2006-05-11
- 发明人: Kenji Fujii , Shuji Koyama , Masaki Osumi , Jun Yamamuro , Hiroyuki Murayama
- 申请人: Kenji Fujii , Shuji Koyama , Masaki Osumi , Jun Yamamuro , Hiroyuki Murayama
- 申请人地址: JP Tokyo
- 专利权人: Canon Kabushiki Kaisha
- 当前专利权人: Canon Kabushiki Kaisha
- 当前专利权人地址: JP Tokyo
- 优先权: JP2004-326717 20041110
- 主分类号: B41J2/05
- IPC分类号: B41J2/05
摘要:
The present invention permits to manufacture, with low cost and good through-put, a liquid discharge recording head in which a nozzle plate is formed from inorganic material. In the liquid discharge recording head according to the present invention, a nozzle plate formed from inorganic material is stacked on a front surface of a silicon substrate including heat generating resistant members for generating energy for discharging liquid and an electric circuit for driving the heat generating resistant members. The liquid can be supplied from a liquid supply port extending through the silicon substrate to flow paths provided between the silicon substrate and the nozzle plate. Recessed portions having predetermined depths are formed in a region of the surface of the silicon substrate, where the flow paths are formed, and discharge ports are formed above the recessed portions.
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