发明申请
- 专利标题: Organic light emitting display with single crystalline silicon TFT and method of fabricating the same
- 专利标题(中): 具有单晶硅TFT的有机发光显示器及其制造方法
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申请号: US11270541申请日: 2005-11-10
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公开(公告)号: US20060102067A1公开(公告)日: 2006-05-18
- 发明人: Takashi Noguchi , Wenxu Xianyu , Huaxiang Yin
- 申请人: Takashi Noguchi , Wenxu Xianyu , Huaxiang Yin
- 申请人地址: KR Suwon-si
- 专利权人: SAMSUNG ELECTRONICS CO., LTD.
- 当前专利权人: SAMSUNG ELECTRONICS CO., LTD.
- 当前专利权人地址: KR Suwon-si
- 优先权: KR10-2004-0091851 20041111; KR10-2005-0031689 20050416
- 主分类号: C30B23/00
- IPC分类号: C30B23/00 ; C30B25/00 ; C30B28/12 ; C30B28/14
摘要:
Provided is an organic light emitting display, in which a semiconductor circuit unit of 2T-1C structure including a switching transistor and a driving transistor formed of single crystalline silicon is formed on a plastic substrate. A method of fabricating the single crystalline silicon includes: growing a single crystalline silicon layer to a predetermined thickness on a crystal growth plate; depositing a buffer layer on the single crystalline silicon layer; forming a partition layer at a predetermined depth in the single crystalline silicon layer by, e.g., implanting hydrogen ions in the single crystalline silicon layer from an upper portion of an insulating layer; attaching a substrate to the buffer layer; and releasing the partition layer of the single crystalline silicon layer by heating the partition layer from the crystal growth plate to obtain a single crystalline silicon layer of a predetermined thickness on the substrate.
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