发明申请
- 专利标题： Optical emission spectroscopy of plasma treated bonding surfaces
- 专利标题（中）： 等离子体处理接合面的光发射光谱
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申请号： US10991694申请日： 2004-11-18
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公开(公告)号： US20060102847A1公开(公告)日： 2006-05-18
- 发明人: Paul Shelley , Peter VanVoast , Thomas Dean , Bruce Davis
- 申请人： Paul Shelley , Peter VanVoast , Thomas Dean , Bruce Davis
- 主分类号： G01J1/42
- IPC分类号： G01J1/42
摘要：
A method and system are provided for real-time contaminant detection and plasma treatment verification during plasma treatment of bonding surfaces. Optical emission spectroscopy (OES) is utilized to determine contamination of a bonding surface prior to the bonding process. OES is further utilized to monitor bonding sites on the bonding surface to verify effectiveness of the plasma treatment.
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