发明申请
- 专利标题: Probe card having deeply recessed trench and method for manufacturing the same
- 专利标题(中): 具有深凹槽的探针卡及其制造方法
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申请号: US11281365申请日: 2005-11-18
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公开(公告)号: US20060109017A1公开(公告)日: 2006-05-25
- 发明人: Bong Kim , Kukjin Chun , Doo Chung , Chi Jeong
- 申请人: Bong Kim , Kukjin Chun , Doo Chung , Chi Jeong
- 专利权人: UniTest Incorporation
- 当前专利权人: UniTest Incorporation
- 优先权: KR10-2004-0096875 20041124
- 主分类号: G01R31/02
- IPC分类号: G01R31/02
摘要:
The present invention relates to a probe card that a probe of the probe card is movable only in a vertical direction using a trench to improve a electrical or a mechanical characteristic and to automatically limit the vertical movement thereof within a predetermined range. A pitch may be reduced so as to correspond to a decreasing distance between pads. A flatness of a probe tip may be maintained within a few micrometers using a semiconductor manufacturing process. 32 simultaneous parallel testing is possible contrary to a convention probe card. A wafer level testing is possible, and time and cost for a wafer testing are reduced.