发明申请
- 专利标题: Lithographic apparatus and device manufacturing method
- 专利标题(中): 平版印刷设备和器件制造方法
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申请号: US10995536申请日: 2004-11-24
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公开(公告)号: US20060109442A1公开(公告)日: 2006-05-25
- 发明人: Erik Loopstra , Petrus Bartray , Antonius Van Dijsseldonk , Paulus Liebregts
- 申请人: Erik Loopstra , Petrus Bartray , Antonius Van Dijsseldonk , Paulus Liebregts
- 申请人地址: NL Veldhoven
- 专利权人: ASML NETHERLANDS B.V.
- 当前专利权人: ASML NETHERLANDS B.V.
- 当前专利权人地址: NL Veldhoven
- 主分类号: G03B27/52
- IPC分类号: G03B27/52
摘要:
A lithographic apparatus includes an illumination system configured to provide a beam of radiation and projection system configured to project the radiation beam onto a target portion of a substrate. At least one of the illumination system and the projection system includes a focusing element for reflecting or refracting the beam. A plurality of stop discs is provided, each having an aperture therethrough, together with a disc positioner configured to place one of the stop discs adjacent the focusing element to control the numerical aperture (NA) of the projection system or illumination system. The apparatus further includes a disc changer configured to select one of the stop discs and provide the selected stop disc to the disc positioner, the disc changer being external to the projection system or illumination system.
公开/授权文献
- US07253880B2 Lithographic apparatus and device manufacturing method 公开/授权日:2007-08-07
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