发明申请
US20060115772A1 Polymeric tetrahedral carbon films, methods of forming the same and methods of forming fine patterns using the same
审中-公开
聚合四面体碳膜，其形成方法和使用其形成精细图案的方法
- 专利标题： Polymeric tetrahedral carbon films, methods of forming the same and methods of forming fine patterns using the same
- 专利标题（中）： 聚合四面体碳膜，其形成方法和使用其形成精细图案的方法
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申请号： US11282368申请日： 2005-11-18
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公开(公告)号： US20060115772A1公开(公告)日： 2006-06-01
- 发明人: Jung-Hwan Hah , Yool Kang , Man-Hyoung Ryoo , Shi-Yong Yi , Sang-Gyun Woo
- 申请人： Jung-Hwan Hah , Yool Kang , Man-Hyoung Ryoo , Shi-Yong Yi , Sang-Gyun Woo
- 专利权人： Samsung Electronics Co., Ltd.
- 当前专利权人： Samsung Electronics Co., Ltd.
- 优先权： KR10-2004-0097946 20041126
- 主分类号： G03C5/00
- IPC分类号： G03C5/00
摘要：
The present invention provides polymeric films including polymers having an sp3 carbon main frame including a tetrahedral center atom. Methods of forming the same, hard marks including the same and methods of forming fine patterns using the same are also provided.
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