发明申请
- 专利标题: Micro oscillating element
- 专利标题(中): 微振荡元件
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申请号: US11271959申请日: 2005-11-14
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公开(公告)号: US20060119216A1公开(公告)日: 2006-06-08
- 发明人: Norinao Kouma , Osamu Tsuboi , Hiromitsu Soneda , Satoshi Ueda , Ippei Sawaki
- 申请人: Norinao Kouma , Osamu Tsuboi , Hiromitsu Soneda , Satoshi Ueda , Ippei Sawaki
- 申请人地址: JP Kawasaki
- 专利权人: FUJITSU LIMITED
- 当前专利权人: FUJITSU LIMITED
- 当前专利权人地址: JP Kawasaki
- 优先权: JP2004-349793 20041202
- 主分类号: G02B26/08
- IPC分类号: G02B26/08 ; G02B26/00 ; H02N1/00
摘要:
A micro oscillating element includes a frame and an oscillation section connected to the frame via a torsional joining section. The oscillation section includes a movable functional section, an arm section and a first comb-tooth electrode. The arm section extends from the functional section. The first comb-tooth electrode includes first electrode teeth extending from the arm section in a direction intersecting the arm section. The micro oscillating element further includes a second comb-tooth electrode to cooperate with the first comb-tooth electrode for causing the oscillation section to oscillate about an oscillation axis defined by the torsional joining section. The second comb-tooth electrode includes second electrode teeth extending from the frame in a direction intersecting the arm section.
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