发明申请
US20060120428A1 Distributed feedback (DFB) semiconductor laser and fabrication method thereof 审中-公开
分布式反馈(DFB)半导体激光器及其制造方法

Distributed feedback (DFB) semiconductor laser and fabrication method thereof
摘要:
The distributed feedback semiconductor laser includes: a lower clad layer formed on a substrate; a ridge including an active layer and an upper clad layer sequentially formed on the lower clad layer; and a grating formed at a sidewall or both sidewalls of the ridge including the active layer in a direction perpendicular to the active layer and a resonance axis so as to enable a single longitudinal mode oscillation. The grating has parallel grooves that are equally spaced at a period equal to an integer multiple of half of an oscillation wavelength λ (nλ/2, n=1, 2, 3 . . . ).
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