- 专利标题: III-nitride light emitting devices fabricated by substrate removal
-
申请号: US11330209申请日: 2006-01-10
-
公开(公告)号: US20060121702A1公开(公告)日: 2006-06-08
- 发明人: Carrie Coman , Fred Kish , Michael Krames , Paul Martin
- 申请人: Carrie Coman , Fred Kish , Michael Krames , Paul Martin
- 主分类号: H01L21/20
- IPC分类号: H01L21/20 ; H01L21/36 ; H01L31/20
摘要:
Devices and techniques for fabricating InAlGaN light-emitting devices are described that result from the removal of light-emitting layers from the sapphire growth substrate. In several embodiments, techniques for fabricating a vertical InAlGaN light-emitting diode structure that result in improved performance and or cost-effectiveness are described. Furthermore, metal bonding, substrate liftoff, and a novel RIE device separation technique are employed to efficiently produce vertical GaN LEDs on a substrate chosen for its thermal conductivity and ease of fabrication.
公开/授权文献
信息查询
IPC分类: