发明申请
- 专利标题: Methods of fabricating flash memory devices having self-aligned floating gate electrodes and related devices
- 专利标题(中): 制造具有自对准浮栅的闪存器件和相关器件的方法
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申请号: US11291142申请日: 2005-11-30
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公开(公告)号: US20060124988A1公开(公告)日: 2006-06-15
- 发明人: Sung-Hoi Hur , Jung-Dal Choi , Kyeong-Tae Kim , Jong-Ho Park , Jae-Duk Lee , Ki-Nam Kim
- 申请人: Sung-Hoi Hur , Jung-Dal Choi , Kyeong-Tae Kim , Jong-Ho Park , Jae-Duk Lee , Ki-Nam Kim
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 优先权: KR10-2004-0099568 20041130
- 主分类号: H01L21/82
- IPC分类号: H01L21/82 ; H01L21/8238
摘要:
A semiconductor memory device is fabricated by forming an active region protruding from a semiconductor substrate, forming an isolation layer on the substrate adjacent opposing sidewalls of the active region, and forming a floating gate electrode on a surface of the active region between the opposing sidewalls thereof. The floating gate electrode is formed to extend beyond edges of the surface of the active region onto the isolation layer. A surface of the floating gate electrode adjacent the active region defines a plane, and the isolation layer is confined between the plane and the substrate. A control gate electrode is formed on a surface of the floating gate electrode opposite the active region. The control gate electrode may be formed to extend along sidewalls of the floating gate electrode towards the substrate beyond the plane defined by the surface of the floating gate electrode adjacent the active region. Related devices are also discussed.
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