发明申请
US20060131634A1 NON-VOLATILE MEMORY, NON-VOLATILE MEMORY CELL AND OPERATION THEREOF
审中-公开
非易失性存储器,非易失性存储器单元及其操作
- 专利标题: NON-VOLATILE MEMORY, NON-VOLATILE MEMORY CELL AND OPERATION THEREOF
- 专利标题(中): 非易失性存储器,非易失性存储器单元及其操作
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申请号: US10905194申请日: 2004-12-21
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公开(公告)号: US20060131634A1公开(公告)日: 2006-06-22
- 发明人: Tzu-Hsuan Hsu , Yen-Hao Shih
- 申请人: Tzu-Hsuan Hsu , Yen-Hao Shih
- 主分类号: H01L21/8238
- IPC分类号: H01L21/8238 ; H01L29/06
摘要:
A non-volatile memory cell comprising a substrate, a charge-trapping layer, a control gate, a first conductive state of source and drain, a lightly doped region and a second conductive state of pocket-doped region. The charge-trapping layer and the control gate are disposed over the substrate. A dielectric layer is disposed between the substrate, the charge-trapping layer and the control gate. The source and drain are disposed in the substrate on each side of the charge-trapping layer. The lightly doped region is disposed on the substrate surface between the source and the charge-trapping layer. The pocket-doped region is disposed within the substrate between the drain and the charge-trapping layer. Because there are asymmetrical configuration and different doped conductive states of implant structures, the programming speed of the memory cell is increased, the neighboring cell disturb issue is prevented, and the area occupation of the bit line selection transistor is reduced.
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