发明申请
US20060138906A1 Piezoelectric device, piezoelectric actuator, piezoelectric pump, inkjet recording head, inkjet printer, surface acoustic wave device, thin-film piezoelectric resonator, frequency filter, oscillator, electronic circuit, and electronic instrument
有权
压电元件，压电致动器，压电泵，喷墨记录头，喷墨打印机，声表面波器件，薄膜压电谐振器，频率滤波器，振荡器，电子电路和电子仪器
- 专利标题： Piezoelectric device, piezoelectric actuator, piezoelectric pump, inkjet recording head, inkjet printer, surface acoustic wave device, thin-film piezoelectric resonator, frequency filter, oscillator, electronic circuit, and electronic instrument
- 专利标题（中）： 压电元件，压电致动器，压电泵，喷墨记录头，喷墨打印机，声表面波器件，薄膜压电谐振器，频率滤波器，振荡器，电子电路和电子仪器
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申请号： US11304938申请日： 2005-12-15
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公开(公告)号： US20060138906A1公开(公告)日： 2006-06-29
- 发明人: Setsuya Iwashita , Takeshi Kijima , Koji Ohashi
- 申请人： Setsuya Iwashita , Takeshi Kijima , Koji Ohashi
- 专利权人： Seiko Epson Corporation
- 当前专利权人： Seiko Epson Corporation
- 优先权： JP2004-380989 20041228
- 主分类号： H01L41/187
- IPC分类号： H01L41/187
摘要：
A piezoelectric device including: a substrate; a first conductive layer formed over the substrate, the first conductive layer including a conductive oxide layer formed of a (001) preferentially oriented lanthanum nickelate, and the lanthanum nickelate having oxygen deficiency; a piezoelectric layer formed over the first conductive layer and including a piezoelectric having a perovskite structure; and a second conductive layer electrically connected with the piezoelectric layer.
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