- 专利标题： Piezoelectric device, piezoelectric actuator, piezoelectric pump, inkjet recording head, inkjet printer, surface acoustic wave device, thin-film piezoelectric resonator, frequency filter, oscillator, electronic circuit, and electronic instrument
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申请号： US11304937申请日： 2005-12-15
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公开(公告)号： US20060139414A1公开(公告)日： 2006-06-29
- 发明人: Setsuya Iwashita , Takeshi Kijima , Koji Ohashi
- 申请人： Setsuya Iwashita , Takeshi Kijima , Koji Ohashi
- 专利权人： Seiko Epson Corporation
- 当前专利权人： Seiko Epson Corporation
- 优先权： JP2004-380988 20041228
- 主分类号： B41J2/045
- IPC分类号： B41J2/045
摘要：
A piezoelectric device includes: a substrate; a first conductive layer formed over the substrate, the first conductive layer including at least one buffer layer formed of a (001) preferentially oriented lanthanum-based layered perovskite compound; a piezoelectric layer formed over the first conductive layer and including a piezoelectric having a perovskite structure; and a second conductive layer electrically connected with the piezoelectric layer.
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