- 专利标题: Microstructure, microreactor, micro heat exchanger and method for fabricating microstructure
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申请号: US11206111申请日: 2005-08-18
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公开(公告)号: US20060140829A1公开(公告)日: 2006-06-29
- 发明人: Kazuaki Tabata , Takayuki Yamada , Mutsuya Takahashi , Yoshihisa Yamazaki
- 申请人: Kazuaki Tabata , Takayuki Yamada , Mutsuya Takahashi , Yoshihisa Yamazaki
- 申请人地址: JP Tokyo
- 专利权人: Fuji Xerox Co., Ltd.
- 当前专利权人: Fuji Xerox Co., Ltd.
- 当前专利权人地址: JP Tokyo
- 优先权: JPP2004-382121 20041228
- 主分类号: B01J8/04
- IPC分类号: B01J8/04 ; B01J10/00
摘要:
A microstructure includes first and second plates. The first plate defines a recess. The second plate is bonded to the first plate to block an opening of the recess to thereby form a closed vacuum space or a closed space filled with inert gas.
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