- 专利标题: Chemically amplified positive photoresist composition for thick film, thick-film photoresist laminated product, manufacturing method for thick-film resist pattern, and manufacturing method for connection terminal
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申请号: US11025591申请日: 2004-12-29
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公开(公告)号: US20060141387A1公开(公告)日: 2006-06-29
- 发明人: Toshiki Okui , Koichi Misumi
- 申请人: Toshiki Okui , Koichi Misumi
- 主分类号: G03C1/76
- IPC分类号: G03C1/76
摘要:
A chemically amplified positive photoresist composition for thick film that is used for forming a thick-film photoresist layer with a film thickness of 10 to 150 μm on top of a support, comprising (A) a compound that generates acid on irradiation with active light or radiation, (B) a resin that displays increased alkali solubility under the action of acid, and (C) an alkali-soluble resin, wherein the component (B) comprises a resin formed from a copolymer containing a structural unit (b1) with a specific structure.
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