Resist top coat composition and patterning process
    9.
    发明授权
    Resist top coat composition and patterning process 有权
    抵抗面漆组合和图案化工艺

    公开(公告)号:US07666572B2

    公开(公告)日:2010-02-23

    申请号:US11808543

    申请日:2007-06-11

    摘要: There is disclosed a resist top coat composition, comprising at least a polymer that has an amino group or a sulfonamide group at a polymer end and that is represented by the following general formula (1); and a patterning process comprising: at least, a step of forming a photoresist film on a substrate; a step of forming a resist top coat on the photoresist film by using the resist top coat composition; a step of exposing the substrate; and a step of developing the substrate with a developer. There can be provided a resist top coat composition that makes it possible to provide more certainly rectangular and excellent resist patterns when a top coat is formed on a photoresist film; and a patterning process using such a composition.

    摘要翻译: 公开了一种抗蚀剂面漆组合物,其至少包含在聚合物末端具有氨基或磺酰胺基团并由以下通式(1)表示的聚合物; 以及图案化工艺,包括:至少在衬底上形成光致抗蚀剂膜的步骤; 通过使用抗蚀剂面漆组合物在光致抗蚀剂膜上形成抗蚀剂面涂层的步骤; 使基板曝光的工序; 以及用显影剂显影衬底的步骤。 可以提供抗蚀剂面漆组合物,当在光致抗蚀剂膜上形成顶涂层时,可以提供更确定的矩形和优异的抗蚀剂图案; 以及使用这种组合物的图案化工艺。