发明申请
- 专利标题: Device and method for measuring thickness
- 专利标题(中): 厚度测量装置及方法
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申请号: US11368095申请日: 2006-03-02
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公开(公告)号: US20060144147A1公开(公告)日: 2006-07-06
- 发明人: Ichiro Ishimaru , Takahiro Okuda
- 申请人: Ichiro Ishimaru , Takahiro Okuda
- 优先权: JP2003-313350 20030905
- 主分类号: G01N3/32
- IPC分类号: G01N3/32 ; G01L1/24
摘要:
A device for measuring thickness of an object has a vibration generator for generating vibrations in the object, a vibration detector for detecting vibrations generated in the object by the vibration generator and a frequency analyzer for calculating resonance frequency of the object. The vibration generator includes a light-emitting part which emits light towards the object to irradiate and to be absorbed by the object. A plurality of vibration detectors may be used and the frequency analyzer may include a sound speed analyzer for calculating speed of sound inside the object from vibrations detected by these plurality of vibration detectors.
公开/授权文献
- US07204146B2 Device and method for measuring thickness 公开/授权日:2007-04-17
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