发明申请
US20060146091A1 Methods for reducing deformations of films in micro-fluid ejection devices
审中-公开
减少微流体喷射装置中膜变形的方法
- 专利标题： Methods for reducing deformations of films in micro-fluid ejection devices
- 专利标题（中）： 减少微流体喷射装置中膜变形的方法
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申请号： US11027705申请日： 2004-12-30
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公开(公告)号： US20060146091A1公开(公告)日： 2006-07-06
- 发明人: Craig Bertelsen , Brian Hart , Gary Holt , Sean Weaver , Gary Williams , Girish Patil
- 申请人： Craig Bertelsen , Brian Hart , Gary Holt , Sean Weaver , Gary Williams , Girish Patil
- 主分类号： B41J2/14
- IPC分类号： B41J2/14 ; B41J2/16
摘要：
A method of making a micro-fluid ejection head structure. The method can include positioning a semiconductor substrate having a fluid feed slot over a nozzle plate film in a bonding orientation therewith such that the substrate overlies the nozzle plate film and the device side of the substrate is substantially downwardly facing so that gravitational forces inhibit deformation of portions of the nozzle plate film toward the device side of the substrate.
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