发明申请
- 专利标题: Optical microelectromechanical device and fabrication method thereof
- 专利标题(中): 光学微机电装置及其制造方法
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申请号: US11135900申请日: 2005-05-24
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公开(公告)号: US20060146391A1公开(公告)日: 2006-07-06
- 发明人: Chia-Sheng Lee , Han-Tu Lin , Jia-Fam Wong
- 申请人: Chia-Sheng Lee , Han-Tu Lin , Jia-Fam Wong
- 专利权人: AU Optronics Corp.
- 当前专利权人: AU Optronics Corp.
- 优先权: TW93141353 20041230
- 主分类号: G02B26/00
- IPC分类号: G02B26/00
摘要:
An optical microelectromechanical (MEMS) device includes a conductive layer, a dielectric layer, a reflective layer and a plurality of supporters between the dielectric layer and reflective layer. The supporters are tapers, or inversed tapers, having an acute angle, wherein a side surface of one of the supporters and the surface of the dielectric layer form the acute angle. Each supporter comprises a horizontal extending portion connecting to the reflective layer, such that the reflective layer is suspended from the dielectric layer by a predetermined gap.
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