公开(公告)号：US07403321B2

公开(公告)日：2008-07-22

申请号：US11133101

申请日：2005-05-19

申请人： Chia-Sheng Lee ,  Han-Tu Lin ,  Jia-Fam Wong

发明人： Chia-Sheng Lee ,  Han-Tu Lin ,  Jia-Fam Wong

IPC分类号： G02B26/00 ,  G02B26/08

CPC分类号： G02B26/001

摘要： An optical microelectromechanical systems (MEMS) device includes a transparent substrate with a plurality of discrete conductive lines, an dielectric layer disposed on the substrate and the conductive lines, reflective members and edge supporters. The reflective members and conductive lines are orthogonal, defining a plurality of pixel areas. Each reflective member is supported by edge supporters arranged around each pixel area and over the dielectric layer by a predetermined gap. The reflective members cover the connecting end of each edge supporter, providing protection from damage during fabrication.

摘要翻译： 光学微机电系统（MEMS）装置包括具有多个离散导电线的透明基板，设置在基板上的电介质层和导电线，反射构件和边缘支撑件。 反射构件和导线是正交的，限定了多个像素区域。 每个反射构件由围绕每个像素区域布置的边缘支撑件支撑并且在介电层上方以预定间隙支撑。 反射构件覆盖每个边缘支撑件的连接端，在制造期间提供防止损坏。

公开(公告)号：US20060146391A1

公开(公告)日：2006-07-06

申请号：US11135900

申请日：2005-05-24

申请人： Chia-Sheng Lee ,  Han-Tu Lin ,  Jia-Fam Wong

发明人： Chia-Sheng Lee ,  Han-Tu Lin ,  Jia-Fam Wong

IPC分类号： G02B26/00

CPC分类号： G02B26/0833 ,  Y10S359/904

摘要： An optical microelectromechanical (MEMS) device includes a conductive layer, a dielectric layer, a reflective layer and a plurality of supporters between the dielectric layer and reflective layer. The supporters are tapers, or inversed tapers, having an acute angle, wherein a side surface of one of the supporters and the surface of the dielectric layer form the acute angle. Each supporter comprises a horizontal extending portion connecting to the reflective layer, such that the reflective layer is suspended from the dielectric layer by a predetermined gap.

摘要翻译： 光学微机电（MEMS）器件包括介电层和反射层之间的导电层，电介质层，反射层和多个支撑体。 支持者是具有锐角的锥形或倒角锥形，其中一个支撑体的侧表面和电介质层的表面形成锐角。 每个支撑件包括连接到反射层的水平延伸部分，使得反射层从电介质层悬挂预定的间隙。

公开(公告)号：US20080158650A1

公开(公告)日：2008-07-03

申请号：US12038221

申请日：2008-02-27

申请人： Chia-Sheng Lee ,  Han-Tu Lin ,  Jia-Fam Wong

发明人： Chia-Sheng Lee ,  Han-Tu Lin ,  Jia-Fam Wong

IPC分类号： G02B26/00

CPC分类号： G02B26/001

摘要： A microelectromechanical optical display devices is provided. An optical layer is disposed on a substrate. A plurality of posts are disposed on the optical layer. A reflective layer is disposed on the plurality of posts. A flexible layer is disposed on the reflective layer, wherein edge of the reflective layer is separated from edge of the flexible layer by a distance equal to or smaller than about 2 μm.

摘要翻译： 提供了一种微机电光学显示装置。 光学层设置在基板上。 多个柱设置在光学层上。 反射层设置在多个柱上。 柔性层设置在反射层上，其中反射层的边缘与柔性层的边缘分开等于或小于约2μm的距离。

公开(公告)号：US07358102B2

公开(公告)日：2008-04-15

申请号：US11093498

申请日：2005-03-30

申请人： Chia-Sheng Lee ,  Han-Tu Lin ,  Jia-Fam Wong

发明人： Chia-Sheng Lee ,  Han-Tu Lin ,  Jia-Fam Wong

IPC分类号： H01L21/00

CPC分类号： G02B26/001

摘要： A Method of forming microelectromechanical optical display devices is provided. A sacrificial layer is formed above a substrate. A plurality of posts penetrating the sacrificial layer is formed. A reflective layer and a flexible layer are sequentially formed above the sacrificial layer and the posts. A photoresist layer is formed on part of the flexible layer. By performing wet etching using the photoresist layer as a mask, a portion of the flexible layer is removed to form a patterned flexible layer. The wet etching is stopped on the reflective layer. The photoresist layer is removed. By performing dry etching using the patterned flexible layer as a mask, a portion of the reflective layer is removed to form a patterned reflective layer. A mechanical layer is formed with the patterned flexible and reflective layers. The sacrificial layer is removed to release the mechanical layer.

摘要翻译： 提供了一种形成微机电光学显示装置的方法。 牺牲层形成在衬底之上。 形成贯穿牺牲层的多个柱。 在牺牲层和柱上方依次形成反射层和柔性层。 光致抗蚀剂层形成在柔性层的一部分上。 通过使用光致抗蚀剂层作为掩模进行湿蚀刻，去除柔性层的一部分以形成图案化的柔性层。 在反射层上停止湿蚀刻。 去除光致抗蚀剂层。 通过使用图案化的柔性层作为掩模进行干蚀刻，去除反射层的一部分以形成图案化的反射层。 机械层形成有图案化的柔性和反射层。 去除牺牲层以释放机械层。

公开(公告)号：US07463406B2

公开(公告)日：2008-12-09

申请号：US12038221

申请日：2008-02-27

申请人： Chia-Sheng Lee ,  Han-Tu Lin ,  Jia-Fam Wong

发明人： Chia-Sheng Lee ,  Han-Tu Lin ,  Jia-Fam Wong

IPC分类号： G02B26/00

CPC分类号： G02B26/001

摘要： A microelectromechanical optical display devices is provided. An optical layer is disposed on a substrate. A plurality of posts are disposed on the optical layer. A reflective layer is disposed on the plurality of posts. A flexible layer is disposed on the reflective layer, wherein edge of the reflective layer is separated from edge of the flexible layer by a distance equal to or smaller than about 2 μm.

摘要翻译： 提供了一种微机电光学显示装置。 光学层设置在基板上。 多个柱设置在光学层上。 反射层设置在多个柱上。 柔性层设置在反射层上，其中反射层的边缘与柔性层的边缘分开等于或小于约2μm的距离。

公开(公告)号：US07164524B2

公开(公告)日：2007-01-16

申请号：US11135900

申请日：2005-05-24

申请人： Chia-Sheng Lee ,  Han-Tu Lin ,  Jia-Fam Wong

发明人： Chia-Sheng Lee ,  Han-Tu Lin ,  Jia-Fam Wong

IPC分类号： G02B26/00 ,  G02B26/08

CPC分类号： G02B26/0833 ,  Y10S359/904

摘要： An optical microelectromechanical (MEMS) device includes a conductive layer, a dielectric layer, a reflective layer and a plurality of supporters between the dielectric layer and reflective layer. The supporters are tapers, or inversed tapers, having an acute angle, wherein a side surface of one of the supporters and the surface of the dielectric layer form the acute angle. Each supporter comprises a horizontal extending portion connecting to the reflective layer, such that the reflective layer is suspended from the dielectric layer by a predetermined gap.

摘要翻译： 光学微机电（MEMS）器件包括介电层和反射层之间的导电层，电介质层，反射层和多个支撑体。 支持者是具有锐角的锥形或倒角锥形，其中一个支撑体的侧表面和电介质层的表面形成锐角。 每个支撑件包括连接到反射层的水平延伸部分，使得反射层从电介质层悬挂预定的间隙。

公开(公告)号：US20060226484A1

公开(公告)日：2006-10-12

申请号：US11218631

申请日：2005-09-06

申请人： Wen-Ching Tsai ,  Kuo-Lung Fang ,  Han-Tu Lin ,  Chia-Sheng Lee

发明人： Wen-Ching Tsai ,  Kuo-Lung Fang ,  Han-Tu Lin ,  Chia-Sheng Lee

IPC分类号： H01L27/12

CPC分类号： H01L29/4908

摘要： A thin film transistor (TFT) is disclosed, and the thin film transistor comprises: a substrate, a gate electrode, a first adhesion layer, a gate insulting layer, a semiconductor layer, and a source electrode and a drain electrode. The gate electrode is formed on the substrate, and the gate electrode is made of silver. The first adhesion layer is formed between the substrate and the gate electrode. A gate insulating layer is formed on the gate electrode. The semiconductor layer is formed on the gate insulating layer. The source electrode and the drain electrode are formed on parts of the semiconductor layer. Accordingly, the reliable TFT is provided through having the Ag metal with low resistivity and good adhesion characteristics.

摘要翻译： 公开了薄膜晶体管（TFT），薄膜晶体管包括：基板，栅电极，第一粘合层，栅极绝缘层，半导体层以及源电极和漏电极。 栅电极形成在基板上，栅电极由银制成。 第一粘附层形成在基板和栅电极之间。 在栅电极上形成栅极绝缘层。 半导体层形成在栅极绝缘层上。 源电极和漏极形成在半导体层的一部分上。 因此，通过具有低电阻率和良好的附着特性的Ag金属来提供可靠的TFT。

公开(公告)号：US20060148262A1

公开(公告)日：2006-07-06

申请号：US11093498

申请日：2005-03-30

申请人： Chia-Sheng Lee ,  Han-Tu Lin ,  Jia-Fam Wong

发明人： Chia-Sheng Lee ,  Han-Tu Lin ,  Jia-Fam Wong

IPC分类号： H01L21/311

CPC分类号： G02B26/001

摘要： A Method of forming microelectromechanical optical display devices is provided. A sacrificial layer is formed above a substrate. A plurality of posts penetrating the sacrificial layer is formed. A reflective layer and a flexible layer are sequentially formed above the sacrificial layer and the posts. A photoresist layer is formed on part of the flexible layer. By performing wet etching using the photoresist layer as a mask, a portion of the flexible layer is removed to form a patterned flexible layer. The wet etching is stopped on the reflective layer. The photoresist layer is removed. By performing dry etching using the patterned flexible layer as a mask, a portion of the reflective layer is removed to form a patterned reflective layer. A mechanical layer is formed with the patterned flexible and reflective layers. The sacrificial layer is removed to release the mechanical layer.

摘要翻译： 提供了一种形成微机电光学显示装置的方法。 牺牲层形成在衬底之上。 形成贯穿牺牲层的多个柱。 在牺牲层和柱上方依次形成反射层和柔性层。 光致抗蚀剂层形成在柔性层的一部分上。 通过使用光致抗蚀剂层作为掩模进行湿蚀刻，去除柔性层的一部分以形成图案化的柔性层。 在反射层上停止湿蚀刻。 去除光致抗蚀剂层。 通过使用图案化的柔性层作为掩模进行干蚀刻，去除反射层的一部分以形成图案化的反射层。 机械层形成有图案化的柔性和反射层。 去除牺牲层以释放机械层。

公开(公告)号：US07598524B2

公开(公告)日：2009-10-06

申请号：US11218631

申请日：2005-09-06

申请人： Wen-Ching Tsai ,  Kuo-Lung Fang ,  Han-Tu Lin ,  Chia-Sheng Lee

发明人： Wen-Ching Tsai ,  Kuo-Lung Fang ,  Han-Tu Lin ,  Chia-Sheng Lee

IPC分类号： H01L31/00

CPC分类号： H01L29/4908

摘要： A thin film transistor (TFT) is disclosed, and the thin film transistor comprises: a substrate, a gate electrode, a first adhesion layer, a gate insulting layer, a semiconductor layer, and a source electrode and a drain electrode. The gate electrode is formed on the substrate, and the gate electrode is made of silver. The first adhesion layer is formed between the substrate and the gate electrode. A gate insulating layer is formed on the gate electrode. The semiconductor layer is formed on the gate insulating layer. The source electrode and the drain electrode are formed on parts of the semiconductor layer. Accordingly, the reliable TFT is provided through having the Ag metal with low resistivity and good adhesion characteristics.

摘要翻译： 公开了薄膜晶体管（TFT），薄膜晶体管包括：基板，栅电极，第一粘合层，栅极绝缘层，半导体层以及源电极和漏电极。 栅电极形成在基板上，栅电极由银制成。 第一粘附层形成在基板和栅电极之间。 在栅电极上形成栅极绝缘层。 半导体层形成在栅极绝缘层上。 源电极和漏极形成在半导体层的一部分上。 因此，通过具有低电阻率和良好的附着特性的Ag金属来提供可靠的TFT。

公开(公告)号：US20060146396A1

公开(公告)日：2006-07-06

申请号：US11133101

申请日：2005-05-19

申请人： Chia-Sheng Lee ,  Han-Tu Lin ,  Jia-Fam Wong

发明人： Chia-Sheng Lee ,  Han-Tu Lin ,  Jia-Fam Wong

IPC分类号： G02F1/00

CPC分类号： G02B26/001

摘要： An optical microelectromechanical systems (MEMS) device includes a transparent substrate with a plurality of discrete conductive lines, an dielectric layer disposed on the substrate and the conductive lines, reflective members and edge supporters. The reflective members and conductive lines are orthogonal, defining a plurality of pixel areas. Each reflective member is supported by edge supporters arranged around each pixel area and over the dielectric layer by a predetermined gap. The reflective members cover the connecting end of each edge supporter, providing protection from damage during fabrication.

摘要翻译： 光学微机电系统（MEMS）装置包括具有多个离散导电线的透明基板，设置在基板上的电介质层和导电线，反射构件和边缘支撑件。 反射构件和导线是正交的，限定了多个像素区域。 每个反射构件由围绕每个像素区域布置的边缘支撑件支撑并且在介电层上方以预定间隙支撑。 反射构件覆盖每个边缘支撑件的连接端，在制造期间提供防止损坏。