发明申请
- 专利标题: Micro-optoelectromechanical system packages for a light modulator and methods of making the same
- 专利标题(中): 用于光调制器的微光机电系统封装及其制造方法
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申请号: US11029316申请日: 2005-01-04
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公开(公告)号: US20060146426A1公开(公告)日: 2006-07-06
- 发明人: Chien-Hua Chen , David Craig , Charles Haluzak
- 申请人: Chien-Hua Chen , David Craig , Charles Haluzak
- 主分类号: G02B7/02
- IPC分类号: G02B7/02
摘要:
A micro-optoelectromechanical system (MOEMS) package for a light modulator includes a sealed modulator package containing a light modulator sealed under a first transparent lid; a secondary, larger package containing the sealed modulator package, the secondary package comprising a seal and a second transparent lid; and an optical material disposed between the first transparent lid and the second transparent lid, where the optical material is a solid or liquid. An alternatively micro-optoelectromechanical system (MOEMS) package for a light modulator includes a sealed modulator package containing a light modulator sealed under a first transparent lid; a secondary, larger package containing the sealed modulator package; and a desiccant or getter material disposed inside the secondary package with the modulator package.
公开/授权文献
信息查询
IPC分类:
G | 物理 |
G02 | 光学 |
G02B | 光学元件、系统或仪器 |
G02B7/00 | 光学元件的安装、调整装置或不漏光连接 |
G02B7/02 | .用于透镜 |