发明申请
US20060146426A1 Micro-optoelectromechanical system packages for a light modulator and methods of making the same 有权
用于光调制器的微光机电系统封装及其制造方法

  • 专利标题: Micro-optoelectromechanical system packages for a light modulator and methods of making the same
  • 专利标题(中): 用于光调制器的微光机电系统封装及其制造方法
  • 申请号: US11029316
    申请日: 2005-01-04
  • 公开(公告)号: US20060146426A1
    公开(公告)日: 2006-07-06
  • 发明人: Chien-Hua ChenDavid CraigCharles Haluzak
  • 申请人: Chien-Hua ChenDavid CraigCharles Haluzak
  • 主分类号: G02B7/02
  • IPC分类号: G02B7/02
Micro-optoelectromechanical system packages for a light modulator and methods of making the same
摘要:
A micro-optoelectromechanical system (MOEMS) package for a light modulator includes a sealed modulator package containing a light modulator sealed under a first transparent lid; a secondary, larger package containing the sealed modulator package, the secondary package comprising a seal and a second transparent lid; and an optical material disposed between the first transparent lid and the second transparent lid, where the optical material is a solid or liquid. An alternatively micro-optoelectromechanical system (MOEMS) package for a light modulator includes a sealed modulator package containing a light modulator sealed under a first transparent lid; a secondary, larger package containing the sealed modulator package; and a desiccant or getter material disposed inside the secondary package with the modulator package.
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