发明申请
US20060150912A1 Ion gun deposition and alignment for liquid-crystal applications 审中-公开
用于液晶应用的离子枪沉积和对准

Ion gun deposition and alignment for liquid-crystal applications
摘要:
An apparatus for depositing and aligning an amorphous film in a single step, a method of forming an aligned film on a substrate in a single step by combining the deposition and alignment of an alignment layer into a single-step using ion beam processing and an amorphous film having an aligned atomic structure prepared by a method in which an aligned film is deposited and aligned in a single step are provided. The film is deposited and aligned in a single step by bombarding a substrate with an ion beam at a designated incident angle to simultaneously (a) deposit the film onto the substrate and (b) arrange an atomic structure of the film in at least one predetermined aligned direction.
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