发明申请
US20060150912A1 Ion gun deposition and alignment for liquid-crystal applications
审中-公开
用于液晶应用的离子枪沉积和对准
- 专利标题: Ion gun deposition and alignment for liquid-crystal applications
- 专利标题(中): 用于液晶应用的离子枪沉积和对准
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申请号: US11371551申请日: 2006-03-09
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公开(公告)号: US20060150912A1公开(公告)日: 2006-07-13
- 发明人: Alessandro Callegari , Praveen Chaudhari , James Doyle , Eileen Galligan , Yoshimine Kato , James Lacey , Shui-Chih Lien , Minhua Lu , Hiroki Nakano , Shuichi Odahara
- 申请人: Alessandro Callegari , Praveen Chaudhari , James Doyle , Eileen Galligan , Yoshimine Kato , James Lacey , Shui-Chih Lien , Minhua Lu , Hiroki Nakano , Shuichi Odahara
- 专利权人: International Business Machines Corp.
- 当前专利权人: International Business Machines Corp.
- 主分类号: C23C16/00
- IPC分类号: C23C16/00
摘要:
An apparatus for depositing and aligning an amorphous film in a single step, a method of forming an aligned film on a substrate in a single step by combining the deposition and alignment of an alignment layer into a single-step using ion beam processing and an amorphous film having an aligned atomic structure prepared by a method in which an aligned film is deposited and aligned in a single step are provided. The film is deposited and aligned in a single step by bombarding a substrate with an ion beam at a designated incident angle to simultaneously (a) deposit the film onto the substrate and (b) arrange an atomic structure of the film in at least one predetermined aligned direction.
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