发明申请
US20060152231A1 Apparatus and method for capacitive measurement of materials 失效
材料电容测量的装置和方法

Apparatus and method for capacitive measurement of materials
摘要:
Method for measuring thicknesses of a film, a foil or a material layer with a measuring head which is spaced away from the film and with which a capacitive thickness measurement is performed, in which an optical distance measurement is performed with a distance measuring device and a distance determined by the optical distance measurement is used in determining the film thickness in the capacitive thickness measurement.
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