发明申请
- 专利标题: Thickness measuring device
- 专利标题(中): 厚度测量装置
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申请号: US10512433申请日: 2003-04-22
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公开(公告)号: US20060152736A1公开(公告)日: 2006-07-13
- 发明人: Teruo Takahashi , Tohru Shimizu
- 申请人: Teruo Takahashi , Tohru Shimizu
- 优先权: JP2002-124599 20020425
- 国际申请: PCT/JP03/05113 WO 20030422
- 主分类号: G01B11/02
- IPC分类号: G01B11/02
摘要:
A Michelson interferometer 1 of a thickness measuring device 100 comprises two optical cables 4 and 5 connected by an optical coupler 3, and the optical cables 4 and 5 are formed by polarization optical fibers 41 or the like, connected by the optical connectors 42 or the like. The optical connectors 42 or the like, are adjusted in angle and position by rotating the optical fibers 41 or the like, to be connected around the optical axis.
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