发明申请
- 专利标题: Laser beam processing machine
- 专利标题(中): 激光束加工机
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申请号: US11338761申请日: 2006-01-25
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公开(公告)号: US20060163224A1公开(公告)日: 2006-07-27
- 发明人: Noboru Takeda , Hiroshi Morikazu , Satoshi Genda , Yukio Morishige
- 申请人: Noboru Takeda , Hiroshi Morikazu , Satoshi Genda , Yukio Morishige
- 专利权人: Disco Corporation
- 当前专利权人: Disco Corporation
- 优先权: JP2005-017815 20050126; JP2005-019915 20050127
- 主分类号: B23K26/00
- IPC分类号: B23K26/00
摘要:
A laser beam processing machine comprising a chuck table for holding a workpiece, a laser beam application means for applying a laser beam to the workpiece held on the chuck table, and a processing-feed means for moving the chuck table and the laser beam application means relative to each other, wherein the chuck table comprises a body and a workpiece holding member disposed on the top surface of the body, and the workpiece holding member is made of a material which transmits a laser beam having a predetermined wavelength.
公开/授权文献
- US07642485B2 Laser beam processing machine 公开/授权日:2010-01-05
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