发明申请
- 专利标题: Planar fly's eye detector
- 专利标题(中): 平面飞行的眼睛探测器
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申请号: US11044500申请日: 2005-01-26
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公开(公告)号: US20060163449A1公开(公告)日: 2006-07-27
- 发明人: Mark Butterworth
- 申请人: Mark Butterworth
- 主分类号: H01J40/14
- IPC分类号: H01J40/14 ; H01J3/14 ; H01L27/00
摘要:
A fly's eye detector includes a planar imaging array and an optical system that directs light with different incident directions to different sensors in the imaging array. One embodiment of the optical system includes a curved reflector above the planar imaging array to deflect and distribute light to the sensors. Another embodiment of the optical system includes a lens array providing variable offsets of micro-lenses relative to the underlying sensors.
公开/授权文献
- US07375312B2 Planar fly's eye detector 公开/授权日:2008-05-20
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