发明申请
- 专利标题: Alumina member and manufacturing method thereof
- 专利标题(中): 氧化铝构件及其制造方法
-
申请号: US11295150申请日: 2005-12-06
-
公开(公告)号: US20060169688A1公开(公告)日: 2006-08-03
- 发明人: Yutaka Mori , Hiroto Matsuda , Kazuhiro Nobori
- 申请人: Yutaka Mori , Hiroto Matsuda , Kazuhiro Nobori
- 申请人地址: JP Nagoya-Shi
- 专利权人: NGK Insulators, Ltd.
- 当前专利权人: NGK Insulators, Ltd.
- 当前专利权人地址: JP Nagoya-Shi
- 优先权: JPP2004-361882 20041214; JPP2005-256484 20050905
- 主分类号: H05B3/68
- IPC分类号: H05B3/68
摘要:
An electrostatic chuck includes a base of a sintered body containing alumina, an electrode as a power-supplied member embedded in the base and supplied with electric power, a bonding member embedded in the base and bonded to the electrode, in which a difference in coefficient of thermal expansion from the sintered body is 2×10−6/K or less, and a melting point is higher than baking temperature of the sintered body, and a terminal bonded to the electrode through the bonding member.
公开/授权文献
- US07564008B2 Alumina member and manufacturing method thereof 公开/授权日:2009-07-21
信息查询