发明申请
US20060169688A1 Alumina member and manufacturing method thereof 有权
氧化铝构件及其制造方法

Alumina member and manufacturing method thereof
摘要:
An electrostatic chuck includes a base of a sintered body containing alumina, an electrode as a power-supplied member embedded in the base and supplied with electric power, a bonding member embedded in the base and bonded to the electrode, in which a difference in coefficient of thermal expansion from the sintered body is 2×10−6/K or less, and a melting point is higher than baking temperature of the sintered body, and a terminal bonded to the electrode through the bonding member.
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