- 专利标题： Automatic optical inspection using multiple objectives
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申请号： US11047435申请日： 2005-01-31
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公开(公告)号： US20060170910A1公开(公告)日： 2006-08-03
- 发明人: Gilad Almogy , Bryan Bolt , Oded Arnon , Boaz Kenan , Ehud Tirosh , Michael Corliss
- 申请人： Gilad Almogy , Bryan Bolt , Oded Arnon , Boaz Kenan , Ehud Tirosh , Michael Corliss
- 专利权人： Applied Materials Israel, Ltd.
- 当前专利权人： Applied Materials Israel, Ltd.
- 主分类号： G01N21/00
- IPC分类号： G01N21/00
摘要：
Apparatus and techniques for automated optical inspection (AOI) utilizing image scanning modules with multiple objectives for each camera are provided. A scanning mechanism includes optical components to sequentially steer optical signals from each of the multiple objectives to the corresponding camera.
公开/授权文献
- US07355689B2 Automatic optical inspection using multiple objectives 公开/授权日：2008-04-08
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