发明申请
US20060180817A1 Silicon phosphor electroluminescence device with nanotip electrode
有权
具有纳米尖电极的硅荧光体电致发光器件
- 专利标题: Silicon phosphor electroluminescence device with nanotip electrode
- 专利标题(中): 具有纳米尖电极的硅荧光体电致发光器件
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申请号: US11061946申请日: 2005-02-17
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公开(公告)号: US20060180817A1公开(公告)日: 2006-08-17
- 发明人: Sheng Hsu , Fengyan Zhang , Gregory Stecker , Robert Barrowcliff
- 申请人: Sheng Hsu , Fengyan Zhang , Gregory Stecker , Robert Barrowcliff
- 专利权人: Sharp Laboratories of America, Inc.
- 当前专利权人: Sharp Laboratories of America, Inc.
- 主分类号: H01L27/15
- IPC分类号: H01L27/15
摘要:
An electroluminescence (EL) device and a method are provided for fabricating said device with a nanotip electrode. The method comprises: forming a bottom electrode with nanotips; forming a Si phosphor layer adjacent the nanotips; and, forming a transparent top electrode. The Si phosphor layer is interposed between the bottom and top electrodes. The nanotips may have a tip base size of about 50 nanometers, or less, a tip height in the range of 5 to 50 nm, and a nanotip density of greater than 100 nanotips per square micrometer. Typically, the nanotips are formed from iridium oxide (IrOx) nanotips. A MOCVD process forms the Ir bottom electrode. The IrOx nanotips are grown from the Ir. In one aspect, the Si phosphor layer is a SRSO layer. In response to an SRSO annealing step, nanocrystalline SRSO is formed with nanocrystals having a size in the range of 1 to 10 nm.
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