发明申请
US20060182886A1 Method and system for improved delivery of a precursor vapor to a processing zone
审中-公开
用于改进将前体蒸气输送到处理区的方法和系统
- 专利标题: Method and system for improved delivery of a precursor vapor to a processing zone
- 专利标题(中): 用于改进将前体蒸气输送到处理区的方法和系统
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申请号: US11058676申请日: 2005-02-15
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公开(公告)号: US20060182886A1公开(公告)日: 2006-08-17
- 发明人: Emmanuel Guidotti , Kenji Suzuki , Gerrit Leusink , Fenton McFeely
- 申请人: Emmanuel Guidotti , Kenji Suzuki , Gerrit Leusink , Fenton McFeely
- 主分类号: C23C16/00
- IPC分类号: C23C16/00 ; B05C11/00
摘要:
A method and system for improved delivery of a solid precursor. A chemically inert coating is provided on system components in a precursor delivery line to reduce decomposition of a relatively unstable precursor vapor in the precursor delivery line, thereby allowing increased delivery of the precursor vapor to a processing zone for depositing a layer on a substrate. The solid precursor can, for example, be a ruthenium carbonyl or a rhenium carbonyl. The inert coating can, for example, be a CxFy-containing polymer, such as polytetrafluoroethylene or ethylene-chlorotrifluoroethylene. Other benefits of using an inert coating include easy periodic cleaning of deposits from the precursor delivery line.