- 专利标题: Charged particle beam extraction and formation apparatus
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申请号: US11207656申请日: 2005-08-18
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公开(公告)号: US20060192132A1公开(公告)日: 2006-08-31
- 发明人: Viktor Kanarov , Alan Hayes , Rustam Yevtukhov , Daniel Yakovlevitch
- 申请人: Viktor Kanarov , Alan Hayes , Rustam Yevtukhov , Daniel Yakovlevitch
- 主分类号: H01J3/14
- IPC分类号: H01J3/14
摘要:
A charged particle apparatus, with multiple electrically conducting semispheric grid electrodes, the grid electrodes mounted in a dielectric mounting ring, with hidden areas or regions to maintain electrical isolation between the grid electrodes as sputter deposits form on the grid electrodes and mounting ring. The grid electrodes are mounted to the mounting ring with slots and fastening pins that allow sliding thermal expansion and contraction between the grid electrodes and mounting ring while substantially maintaining alignment of grid openings and spacing between the grid electrodes. Asymmetric fastening pins facilitate the sliding thermal expansion while restraining the grid electrodes. Electrical contactors supply and maintain electrical potentials of the grid electrodes with spring loaded sliding contacts, without substantially affecting the thermal characteristics of the grid electrodes.
公开/授权文献
- US07414355B2 Charged particle beam extraction and formation apparatus 公开/授权日:2008-08-19
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