发明申请
- 专利标题: DRAM device and method of manufacturing the same
- 专利标题(中): DRAM装置及其制造方法
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申请号: US11358060申请日: 2006-02-22
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公开(公告)号: US20060197131A1公开(公告)日: 2006-09-07
- 发明人: Hong-Sik Yoon , In-Seok Yeo , Seung-Jae Baik , Zong-Liang Huo , Shi-Eun Kim
- 申请人: Hong-Sik Yoon , In-Seok Yeo , Seung-Jae Baik , Zong-Liang Huo , Shi-Eun Kim
- 专利权人: Samsung Electronics Co., LTD.
- 当前专利权人: Samsung Electronics Co., LTD.
- 优先权: KR2005-0018405 20050305
- 主分类号: H01L29/94
- IPC分类号: H01L29/94
摘要:
In a DRAM device and a method of manufacturing the same, a multiple tunnel junction (MTJ) structure is provided, which includes conductive patterns and nonconductive patterns alternately stacked on each other. The nonconductive patterns have a band gap larger than a band gap of the conductive patterns. A gate insulation layer and a gate electrode are formed on a sidewall of the MTJ structure. A word line is connected with the MTJ structure, and a bit line is connected with one of top and bottom surfaces of the MTJ structure. A capacitor is connected with one of top and bottom surfaces of the MTJ structure that is not connected with the bit line. Current leakage in the DRAM device is reduced and a unit cells may be vertically stacked on the substrate, so a smaller surface area of the substrate is required for the DRAM device.
公开/授权文献
- US07384841B2 DRAM device and method of manufacturing the same 公开/授权日:2008-06-10
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