发明申请
US20060201412A1 Method of making highly uniform low-stress single crystals with reduced scattering
审中-公开
制备具有降低散射的高度均匀的低应力单晶的方法
- 专利标题: Method of making highly uniform low-stress single crystals with reduced scattering
- 专利标题(中): 制备具有降低散射的高度均匀的低应力单晶的方法
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申请号: US11366634申请日: 2006-03-02
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公开(公告)号: US20060201412A1公开(公告)日: 2006-09-14
- 发明人: Christian Poetisch , Gunther Wehrhahn , Lutz Parthier , Hans-Joerg Axmann , Joerg Staeblein
- 申请人: Christian Poetisch , Gunther Wehrhahn , Lutz Parthier , Hans-Joerg Axmann , Joerg Staeblein
- 优先权: DE102005010654.4 20050308; DE102005013876.4 20050324
- 主分类号: C30B15/00
- IPC分类号: C30B15/00 ; C30B21/06 ; C30B27/02 ; C30B28/10 ; C30B30/04
摘要:
The method produces highly uniform, low-stress single crystals, especially of calcium fluoride. A single crystal drawn from a melt apparatus with a suitable process is cooled and subsequently subjected to a tempering step. The method is characterized by rapid cooling in a temperature range between less than or equal to 1300° C. and greater than or equal to 1050° C. with a cooling rate of greater than or equal to 10 K/h and preferably less than or equal to 60 K/h.
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