发明申请
- 专利标题： Electrochemical etching
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申请号： US11081762申请日： 2005-03-15
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公开(公告)号： US20060207890A1公开(公告)日： 2006-09-21
- 发明人: Norbert Staud
- 申请人： Norbert Staud
- 主分类号： C25F3/02
- IPC分类号： C25F3/02
摘要：
Methods to etch a workpiece are described. In one embodiment, a workpiece is disposed within an etchant solution having a composition comprising a dilute acid and a non-ionic surfactant. An electric field is generated within the etchant solution to cause an anisotropic etch pattern to form on a surface of the workpiece.