发明申请
US20060207971A1 Atmospheric transfer chamber, processed object transfer method, program for performing the transfer method, and storage medium storing the program
审中-公开
大气传送室，处理对象传送方法，执行传送方法的程序以及存储程序的存储介质
- 专利标题： Atmospheric transfer chamber, processed object transfer method, program for performing the transfer method, and storage medium storing the program
- 专利标题（中）： 大气传送室，处理对象传送方法，执行传送方法的程序以及存储程序的存储介质
-
申请号： US11376163申请日： 2006-03-16
-
公开(公告)号： US20060207971A1公开(公告)日： 2006-09-21
- 发明人: Tsuyoshi Moriya , Takaaki Hirooka , Akitaka Shimizu , Satoshi Tanaka
- 申请人： Tsuyoshi Moriya , Takaaki Hirooka , Akitaka Shimizu , Satoshi Tanaka
- 申请人地址： JP Minato-ku
- 专利权人： TOKYO ELECTRON LIMITED
- 当前专利权人： TOKYO ELECTRON LIMITED
- 当前专利权人地址： JP Minato-ku
- 优先权： JP2005-078092 20050317
- 主分类号： C23F1/00
- IPC分类号： C23F1/00 ; H01L21/306 ; B44C1/22
摘要：
An atmospheric transfer chamber, connected to an object processing chamber for processing a target object by using a plasma of a halogen-based gas, for transferring the target object therein, the atmospheric transfer chamber includes a dehumidifying unit for dehumidifying air in the atmospheric transfer chamber. The dehumidifying unit includes a desiccant filter, a cooling unit for cooling the air introduced into the atmospheric transfer chamber, and an air conditioner. The atmospheric transfer chamber is connected to a reaction product removal chamber for removing reaction products of a halogen-based gas attached to the target object, wherein halogen in reaction products attached to the target object is reduced.
信息查询
