发明申请
- 专利标题: Inspection method and inspection apparatus
- 专利标题(中): 检验方法和检验仪器
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申请号: US11376285申请日: 2006-03-15
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公开(公告)号: US20060210141A1公开(公告)日: 2006-09-21
- 发明人: Kazuto Kojitani , Atsushi Shimizu , Hiroshi Tasaki
- 申请人: Kazuto Kojitani , Atsushi Shimizu , Hiroshi Tasaki
- 申请人地址: JP Kyoto
- 专利权人: OMRON Corporation
- 当前专利权人: OMRON Corporation
- 当前专利权人地址: JP Kyoto
- 优先权: JP2005-074673 20050316
- 主分类号: G06K9/46
- IPC分类号: G06K9/46 ; G06K9/00
摘要:
An inspection method and an inspection apparatus are disclosed, wherein the appropriate inspection can be conducted in accordance with the situation change of a nonconforming product from an initial stage, an adjust stage and a stable stage. The conformity/nonconformity is discriminated according to a MTS model and a one class SVM model based on the normal data obtained from a conforming product. The conformity/nonconformity is discriminated by both the MTS and the one class SVM in an adjust stage where a sufficient amount of sample data cannot be acquired or the shape of the conforming product distribution in the feature space and the shape of the normal area are unstable, and only by the MTS in a stable stage where a sufficient amount of sample data can be acquired and the shape of the conforming product distribution and the shape of the normal area are stable.