发明申请
- 专利标题: Acceleration sensor and method for manufacturing the same
- 专利标题(中): 加速度传感器及其制造方法
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申请号: US11384330申请日: 2006-03-21
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公开(公告)号: US20060213268A1公开(公告)日: 2006-09-28
- 发明人: Kazushi Asami , Yukihiro Takeuchi , Kenichi Yokoyama
- 申请人: Kazushi Asami , Yukihiro Takeuchi , Kenichi Yokoyama
- 申请人地址: JP Kariya-city
- 专利权人: DENSO CORPORATION
- 当前专利权人: DENSO CORPORATION
- 当前专利权人地址: JP Kariya-city
- 优先权: JP2005085405 20050324
- 主分类号: G01P15/00
- IPC分类号: G01P15/00
摘要:
An acceleration sensor includes: a semiconductor substrate including a support layer and a semiconductor layer, which are stacked in a first direction; a movable electrode and a fixed electrode; and a trench. The movable electrode separately faces the fixed electrode by sandwiching the trench along with a second direction. The trench has a detection distance in the second direction. The movable electrode is movable along with the first direction when acceleration is applied. The movable electrode has a bottom apart from the support layer. The width of the movable electrode along with the second direction is smaller than the width of the fixed electrode. The thickness of the movable electrode along with the first direction is smaller than the thickness of the fixed electrode.
公开/授权文献
- US07418864B2 Acceleration sensor and method for manufacturing the same 公开/授权日:2008-09-02