公开(公告)号：US08610246B2

公开(公告)日：2013-12-17

申请号：US13084074

申请日：2011-04-11

申请人： Shinji Yoshihara ,  Kazushi Asami ,  Yasuhiro Kitamura ,  Junji Oohara

发明人： Shinji Yoshihara ,  Kazushi Asami ,  Yasuhiro Kitamura ,  Junji Oohara

IPC分类号： H01L29/00

CPC分类号： H01L21/6835 ,  H01F5/003 ,  H01F41/041 ,  H01F41/046 ,  H01L2924/0002 ,  H05K1/165 ,  H05K2201/09672 ,  H01L2924/00

摘要： In a manufacturing method for a semiconductor device having a coil layer part on a substrate, two support substrates each having a flat surface are prepared, and a component member is formed on the flat surface of each of the support substrates. The component member includes a wiring portion having a predetermined pattern and an insulation film surrounding the wiring portion. The wiring portion is provided with a connecting portion exposing from the insulation film. A coil layer part is formed by opposing and bonding the component members formed on the support substrates to each other while applying pressure in a condition where the flat surfaces of the support substrates are parallel to each other. A coil is formed in the coil layer part by connecting the wiring portions through the connecting portions.

摘要翻译： 在具有在基板上具有线圈层部分的半导体器件的制造方法中，准备了具有平坦表面的两个支撑基板，并且在每个支撑基板的平坦表面上形成有部件。 该部件包括具有预定图案的布线部分和围绕布线部分的绝缘膜。 布线部分设置有从绝缘膜露出的连接部分。 线圈层部分通过在支撑基板的平坦表面彼此平行的状态下相对地并且将形成在支撑基板上的部件彼此相对并粘合而形成，同时施加压力。 通过连接部分连接布线部分，在线圈层部分中形成线圈。

公开(公告)号：US20120080772A1

公开(公告)日：2012-04-05

申请号：US13246065

申请日：2011-09-27

申请人： Kazushi Asami ,  Yasuhiro Kitamura

发明人： Kazushi Asami ,  Yasuhiro Kitamura

IPC分类号： H01L29/92 ,  H01L21/02

CPC分类号： H01L28/91 ,  H01L21/76898 ,  H01L23/481 ,  H01L23/642 ,  H01L2924/0002 ,  H01L2924/00

摘要： A semiconductor device includes a substrate, a first single conductor, a single insulator, and a second single conductor. The substrate includes first and second regions located adjacent to each other. The first region has blind holes, each of which has an opening on a front surface of the substrate. The second region has a through hole penetrating the substrate. A width of each blind hole is less than a width of the through hole. The first single conductor is formed on the front surface of the substrate in such a manner that an inner surface of each blind hole and an inner surface of the through hole are covered with the first single conductor. The single insulator is formed on the first single conductor. The second single conductor is formed on the single insulator and electrically insulated form the first single conductor.

摘要翻译： 半导体器件包括衬底，第一单导体，单绝缘体和第二单导体。 衬底包括彼此相邻定位的第一和第二区域。 第一区域具有盲孔，每个盲孔在基板的前表面上具有开口。 第二区域具有穿透基板的通孔。 每个盲孔的宽度小于通孔的宽度。 第一单导体形成在基板的前表面上，使得每个盲孔的内表面和通孔的内表面被第一单导体覆盖。 单个绝缘体形成在第一单个导体上。 第二单导体形成在单个绝缘体上并且电绝缘形成第一单导体。

公开(公告)号：US07900512B2

公开(公告)日：2011-03-08

申请号：US11878441

申请日：2007-07-24

申请人： Kazuhiko Kano ,  Akihiko Teshigahara ,  Kazuki Arakawa ,  Kazushi Asami

发明人： Kazuhiko Kano ,  Akihiko Teshigahara ,  Kazuki Arakawa ,  Kazushi Asami

IPC分类号： G01P9/04

CPC分类号： G01C19/5698

摘要： An angular rate sensor comprises a piezoelectric film having a first and a second surfaces forming an x-y plane and utilizes a perturbation mass coherently vibrating elastic acoustic waves on which a Coriolis force acts when the angular rate sensor undergoes a rotary motion about an x-direction. A first elastic acoustic wave is excited in the piezoelectric film by a driving transducer and a second elastic acoustic wave generated by the Coriolis force proportional to an angular rate of the rotary motion of the angular rate sensor itself is detected by the detecting transducer. The angular rate sensor further comprises at least a first electrode disposed on the first surface of the piezoelectric film for discharging a surface charge caused due to piezoelectric effect at the lower surface of the film in which the first elastic acoustic wave is excited.

摘要翻译： 角速率传感器包括具有形成x-y平面的第一和第二表面的压电膜，并且当角速率传感器经历围绕x方向的旋转运动时，利用科里奥利力作用的扰动质量相干振动的弹性声波。 第一弹性声波通过驱动传感器在压电膜中激发，并且由与角速率传感器本身的旋转运动的角速度成比例的科里奥利力产生的第二弹性声波由检测换能器检测。 角速率传感器还包括至少第一电极，其设置在压电膜的第一表面上，用于在其中激发第一弹性声波的膜的下表面处排出由于压电效应引起的表面电荷。

公开(公告)号：US20110041605A1

公开(公告)日：2011-02-24

申请号：US12923971

申请日：2010-10-19

申请人： Kazuhiko Kano ,  Akihiko Teshigahara ,  Kazuki Arakawa ,  Kazushi Asami

发明人： Kazuhiko Kano ,  Akihiko Teshigahara ,  Kazuki Arakawa ,  Kazushi Asami

IPC分类号： G01C19/56

CPC分类号： G01C19/5698

摘要： An angular rate sensor comprises a piezoelectric film having a first and a second surfaces forming an x-y plane and utilizes a perturbation mass coherently vibrating elastic acoustic waves on which a Coriolis force acts when the angular rate sensor undergoes a rotary motion about an x-direction. A first elastic acoustic wave is excited in the piezoelectric film by a driving transducer and a second elastic acoustic wave generated by the Coriolis force proportional to an angular rate of the rotary motion of the angular rate sensor itself is detected by the detecting transducer. The angular rate sensor further comprises at least a first electrode disposed on the first surface of the piezoelectric film for discharging a surface charge caused due to piezoelectric effect at the lower surface of the film in which the first elastic acoustic wave is excited.

公开(公告)号：US20110041604A1

公开(公告)日：2011-02-24

申请号：US12923970

申请日：2010-10-19

申请人： Kazuhiko Kano ,  Akihiko Teshigahara ,  Kazuki Arakawa ,  Kazushi Asami

发明人： Kazuhiko Kano ,  Akihiko Teshigahara ,  Kazuki Arakawa ,  Kazushi Asami

IPC分类号： G01C19/56

CPC分类号： G01C19/5698

摘要： An angular rate sensor comprises a piezoelectric film having a first and a second surfaces forming an x-y plane and utilizes a perturbation mass coherently vibrating elastic acoustic waves on which a Coriolis force acts when the angular rate sensor undergoes a rotary motion about an x-direction. A first elastic acoustic wave is excited in the piezoelectric film by a driving transducer and a second elastic acoustic wave generated by the Coriolis force proportional to an angular rate of the rotary motion of the angular rate sensor itself is detected by the detecting transducer. The angular rate sensor further comprises at least a first electrode disposed on the first surface of the piezoelectric film for discharging a surface charge caused due to piezoelectric effect at the lower surface of the film in which the first elastic acoustic wave is excited.

公开(公告)号：US07418864B2

公开(公告)日：2008-09-02

申请号：US11384330

申请日：2006-03-21

申请人： Kazushi Asami ,  Yukihiro Takeuchi ,  Kenichi Yokoyama

发明人： Kazushi Asami ,  Yukihiro Takeuchi ,  Kenichi Yokoyama

IPC分类号： G01P15/125 ,  G01P15/00

CPC分类号： B81B3/0086 ,  B81B2201/0235 ,  G01P15/0802 ,  G01P15/125 ,  G01P2015/0831

摘要： An acceleration sensor includes: a semiconductor substrate including a support layer and a semiconductor layer, which are stacked in a first direction; a movable electrode and a fixed electrode; and a trench. The movable electrode separately faces the fixed electrode by sandwiching the trench along with a second direction. The trench has a detection distance in the second direction. The movable electrode is movable along with the first direction when acceleration is applied. The movable electrode has a bottom apart from the support layer. The width of the movable electrode along with the second direction is smaller than the width of the fixed electrode. The thickness of the movable electrode along with the first direction is smaller than the thickness of the fixed electrode.

摘要翻译： 加速度传感器包括：包括沿第一方向堆叠的支撑层和半导体层的半导体衬底; 可动电极和固定电极; 和沟槽。 可移动电极通过与第二方向一起夹住沟槽而分开面对固定电极。 沟槽在第二方向上具有检测距离。 当施加加速度时，可移动电极与第一方向一起可移动。 可动电极具有与支撑层分离的底部。 可动电极与第二方向的宽度小于固定电极的宽度。 可移动电极与第一方向的厚度小于固定电极的厚度。

公开(公告)号：US6119518A

公开(公告)日：2000-09-19

申请号：US906044

申请日：1997-08-05

申请人： Takeshi Itou ,  Yasushi Matsuhiro ,  Muneo Yorinaga ,  Kazushi Asami ,  Yoshimi Yoshino ,  Kazuhiko Miura

发明人： Takeshi Itou ,  Yasushi Matsuhiro ,  Muneo Yorinaga ,  Kazushi Asami ,  Yoshimi Yoshino ,  Kazuhiko Miura

IPC分类号： G01C19/56 ,  G01C19/5621 ,  G01C19/5628 ,  G01P9/00

CPC分类号： G01C19/5607

摘要： An angular velocity sensor includes a tuning-fork oscillator having a pair of arms jointed by a trunk, the pair of arms extending in parallel to each other, first and second driving piezoelectric elements arranged only on one surface of the trunk with a gap therebetween in an extending direction of the arms, and angular velocity detecting piezoelectric elements arranged on surfaces of the arms in parallel with the one surface of the trunk on which the first and second piezoelectric elements are arranged.

摘要翻译： 角速度传感器包括音叉振荡器，该音叉具有一对臂，所述一对臂由主体连接，所述一对臂彼此平行地延伸，第一和第二驱动压电元件仅布置在躯干的一个表面上，其间具有间隙 臂的延伸方向以及布置在臂的表面上并与第一和第二压电元件布置在其上的主体的一个表面平行的角速度检测压电元件。

公开(公告)号：US20080028855A1

公开(公告)日：2008-02-07

申请号：US11878441

申请日：2007-07-24

申请人： Kazuhiko Kano ,  Akihiko Teshigahara ,  Kazuki Arakawa ,  Kazushi Asami

发明人： Kazuhiko Kano ,  Akihiko Teshigahara ,  Kazuki Arakawa ,  Kazushi Asami

IPC分类号： G01C19/00

CPC分类号： G01C19/5698

摘要： An angular rate sensor comprises a piezoelectric film having a first and a second surfaces forming an x-y plane and utilizes a perturbation mass coherently vibrating elastic acoustic waves on which a Coriolis force acts when the angular rate sensor undergoes a rotary motion about an x-direction. A first elastic acoustic wave is excited in the piezoelectric film by a driving transducer and a second elastic acoustic wave generated by the Coriolis force proportional to an angular rate of the rotary motion of the angular rate sensor itself is detected by the detecting transducer. The angular rate sensor further comprises at least a first electrode disposed on the first surface of the piezoelectric film for discharging a surface charge caused due to piezoelectric effect at the lower surface of the film in which the first elastic acoustic wave is excited.

摘要翻译： 角速率传感器包括具有形成x-y平面的第一和第二表面的压电膜，并且当角速率传感器经历围绕x方向的旋转运动时，利用科里奥利力作用的扰动质量相干振动的弹性声波。 第一弹性声波通过驱动传感器在压电膜中激发，并且由与角速率传感器本身的旋转运动的角速度成比例的科里奥利力产生的第二弹性声波由检测换能器检测。 角速率传感器还包括至少第一电极，其设置在压电膜的第一表面上，用于在其中激发第一弹性声波的膜的下表面处排出由于压电效应引起的表面电荷。

公开(公告)号：US07214625B2

公开(公告)日：2007-05-08

申请号：US10936539

申请日：2004-09-09

申请人： Kazushi Asami ,  Junji Oohara ,  Hiroshi Muto ,  Kazuhiko Sugiura ,  Tsuyoshi Fukada ,  Yukihiro Takeuchi

发明人： Kazushi Asami ,  Junji Oohara ,  Hiroshi Muto ,  Kazuhiko Sugiura ,  Tsuyoshi Fukada ,  Yukihiro Takeuchi

IPC分类号： H01L21/302 ,  H01L21/461 ,  H01L29/82

CPC分类号： B81C1/00619 ,  B81C2201/0112

摘要： A method for manufacturing a semiconductor device having a movable portion includes the steps of: forming a trench on a semiconductor layer so that the trench reaches an insulation layer; and forming a movable portion by etching a sidewall of the trench so that the semiconductor layer is separated from the insulation layer. The steps of forming the trench and forming the movable portion are performed by a reactive ion etching method. The insulation layer disposed on the bottom of the trench is prevented from charging positively in the step of forming the trench. The insulation layer disposed on the bottom of the trench is charged positively in the step of forming the movable portion.

摘要翻译： 一种制造具有可移动部分的半导体器件的方法包括以下步骤：在半导体层上形成沟槽，使得沟槽到达绝缘层; 以及通过蚀刻沟槽的侧壁形成可动部分，使得半导体层与绝缘层分离。 通过反应离子蚀刻方法进行形成沟槽并形成可动部的步骤。 在形成沟槽的步骤中，防止设置在沟槽底部的绝缘层被正面地充电。 设置在沟槽底部的绝缘层在形成可移动部分的步骤中被正向地充电。

公开(公告)号：US07105902B2

公开(公告)日：2006-09-12

申请号：US10752588

申请日：2004-01-08

申请人： Kazushi Asami ,  Kazuhiko Kano ,  Tetsuo Y Shioka

发明人： Kazushi Asami ,  Kazuhiko Kano ,  Tetsuo Y Shioka

IPC分类号： H01L29/82

CPC分类号： G02B26/0841

摘要： An optical device includes a semiconductor substrate having an opening, a support member disposed on the substrate, and a movable portion disposed on the opening of the substrate. The movable portion is supported by the support member so that the movable portion is movable. The device has a large scanning angle. Further, the device can scan widely at any frequency.

摘要翻译： 光学装置包括具有开口的半导体衬底，设置在衬底上的支撑构件和设置在衬底的开口上的可移动部分。 可移动部分由支撑构件支撑，使得可移动部分是可移动的。 该装置具有较大的扫描角度。 此外，该设备可以以任何频率广泛扫描。