发明申请
US20060213885A1 MICRO-MACHINING EMPLOYING MULTIPLE INDEPENDENTLY FOCUSED AND INDEPENDENTLY STEERED BEAMS
审中-公开
微型加工采用多个独立聚焦和独立转向的物体
- 专利标题： MICRO-MACHINING EMPLOYING MULTIPLE INDEPENDENTLY FOCUSED AND INDEPENDENTLY STEERED BEAMS
- 专利标题（中）： 微型加工采用多个独立聚焦和独立转向的物体
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申请号： US11420445申请日： 2006-05-25
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公开(公告)号： US20060213885A1公开(公告)日： 2006-09-28
- 发明人: Abraham GROSS , Zvi KOTLER , Eliezer LIPMAN , Dan ALON
- 申请人： Abraham GROSS , Zvi KOTLER , Eliezer LIPMAN , Dan ALON
- 申请人地址： US IL Yavne
- 专利权人： ORBOTECH LTD
- 当前专利权人： ORBOTECH LTD
- 当前专利权人地址： US IL Yavne
- 主分类号： B23K26/067
- IPC分类号： B23K26/067 ; B23K26/38
摘要：
A system for delivering energy to a substrate includes a laser energy source providing at least two laser beams, wherein each of the beams is steered to an independently selectable location on a target, and is independently focused onto the target.