- 专利标题: Method for manufacturing photoelectric transducer, and electronic apparatus
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申请号: US11374119申请日: 2006-03-14
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公开(公告)号: US20060214088A1公开(公告)日: 2006-09-28
- 发明人: Masahiro Furusawa , Ichio Yudasaka , Hideki Tanaka , Tsutomu Miyamoto , Hideo Shimamura
- 申请人: Masahiro Furusawa , Ichio Yudasaka , Hideki Tanaka , Tsutomu Miyamoto , Hideo Shimamura
- 申请人地址: JP Tokyo
- 专利权人: Seiko Epson Corporation
- 当前专利权人: Seiko Epson Corporation
- 当前专利权人地址: JP Tokyo
- 优先权: JP2005-088852 20050325
- 主分类号: G01J1/42
- IPC分类号: G01J1/42
摘要:
A method for manufacturing a photoelectric transducer, comprising: forming a first electrode on a substrate; forming a first conductivity-type semiconductor layer on the first electrode; forming an I type semiconductor layer on the first conductivity-type semiconductor layer; forming on the I type semiconductor layer a second conductivity-type semiconductor layer that is different from the first conductivity-type; and forming a second electrode on the second conductivity-type semiconductor layer, wherein the forming of the I type semiconductor layer includes: forming a precursor film of the I type semiconductor layer on the first conductivity-type semiconductor layer by arranging droplets containing a silicon compound in an island shape; and converting the precursor film into the I type semiconductor layer by carrying out heat treatment or photoirradiation treatment to the precursor film.
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