发明申请
- 专利标题: Pattern exposure method and apparatus
- 专利标题(中): 图案曝光方法和装置
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申请号: US11353017申请日: 2006-02-14
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公开(公告)号: US20060215139A1公开(公告)日: 2006-09-28
- 发明人: Yoshitada Oshida , Yoshitatsu Naito , Mituhiro Suzuki , Tsuyoshi Yamaguchi , Shigenobu Maruyama
- 申请人: Yoshitada Oshida , Yoshitatsu Naito , Mituhiro Suzuki , Tsuyoshi Yamaguchi , Shigenobu Maruyama
- 申请人地址: JP Ebina-shi
- 专利权人: Hitachi Via Mechanics Ltd.
- 当前专利权人: Hitachi Via Mechanics Ltd.
- 当前专利权人地址: JP Ebina-shi
- 优先权: JP2005-087240 20050324
- 主分类号: G03B27/52
- IPC分类号: G03B27/52
摘要:
A maskless exposure method and a maskless exposure apparatus in which maskless exposure can be performed efficiently with high-directivity illumination light, while the exposure efficiency of solder resist can be improved. Blue-violet semiconductor lasers 12A emitting laser beams 1a with a wavelength of 405 nm and ultraviolet semiconductor lasers 12B emitting laser beams 1b with a wavelength of 375 nm are provided to irradiate a substrate 8 with the laser beams 1a and 1b whose optical axes are made coaxial. In this event, one and the same place on the substrate 8 is irradiated with the laser beams 1a and 1b a plurality of times. Thus, the variation in intensity of the laser beams 1a and 1b is averaged.
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