发明申请
- 专利标题： Defect analysis using a yield vehicle
- 专利标题（中）： 使用屈服载体的缺陷分析
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申请号： US11247517申请日： 2005-10-11
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公开(公告)号： US20060226847A1公开(公告)日： 2006-10-12
- 发明人: Jan Fure , Richard Schultz , Derryl Allman
- 申请人： Jan Fure , Richard Schultz , Derryl Allman
- 申请人地址： US CA Milpitas
- 专利权人： LSI Logic Corporation
- 当前专利权人： LSI Logic Corporation
- 当前专利权人地址： US CA Milpitas
- 主分类号： G01R31/00
- IPC分类号： G01R31/00
摘要：
A system and method for collecting and analyzing optical inspection results obtained during the manufacturing process and comparing those results to actual functional results of a specially designed test vehicle integrated circuit. The test vehicle integrated circuit allows failures to be localized to very small areas, which allows more accurate correlation between inspection faults and functional failures. The correlation of inspection faults to actual functional failures is used to change the sensitivity settings for an optical inspection system to more accurately detect defects that are likely to be functional failures.
公开/授权文献
- US07284213B2 Defect analysis using a yield vehicle 公开/授权日：2007-10-16
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